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Periodical PCMI Journal http://www.pcmi.org/store/product_info.php?products_id=34&osCsid=c8f50cc3ce7698433955164d1b9c7e32 Book “Photoresists in PCM Applications” http://www.pcmi.org/store/product_info.php?products_id=39&osCsid=c8f50cc3ce7698433955164d1b9c7e32 Plasma Process for Semiconductor Fabrication http://www.cambridge.org/us/catalogue/catalogue.asp?isbn=0521591759 Glow Discharge Processes: Sputtering and Plasma Etching http://www.wiley.com/WileyCDA/WileyTitle/productCd-047107828X.html