Resources and Articles

Metal Acid Etching Resources

Periodical
PCMI Journal
http://www.pcmi.org/store/product_info.php?products_id=34&osCsid=c8f50cc3ce7698433955164d1b9c7e32

Book
"Photoresists in PCM Applications"
http://www.pcmi.org/store/product_info.php?products_id=39&osCsid=c8f50cc3ce7698433955164d1b9c7e32

Plasma Process for Semiconductor Fabrication
http://www.cambridge.org/us/catalogue/catalogue.asp?isbn=0521591759

Glow Discharge Processes: Sputtering and Plasma Etching

http://www.wiley.com/WileyCDA/WileyTitle/productCd-047107828X.html

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Metal Acid Etching Related Articles

"Process Guidelines for Alkaline Etching"
http://www.chemcut.net/pdf/Alkaline-Etch-Process.pdf
 
"Process Guidelines for Cupric Chloride Etching "
http://www.chemcut.net/pdf/Cupric-Chloride.pdf

"Voltage Controls Etching Process"
http://articles.findarticles.com/p/articles/mi_m0WVI/is_2001_May_21/ai_74988075

"Putting the Spin on Semiconductors"
http://www.fluent.com/about/news/newsletters/03v12i2/a24.htm

"Metal Stencil Overview"
http://www.tkb-4u.com/articles/printing/metalstenciloverview/metalstenciloverview.php

"Plasma-Etching Process for ULSI Semiconductor Circuits"
http://www.research.ibm.com/journal/rd/431/armacost.html